Application Specific Megasonics Generator Introduced by PCT Systems for Cleaning Fine Geometries and Fragile Semiconductor Devices
2008-06-10 23:49:33 -
www.pctsystems.com - PCT Systems, Inc. Sharyl Maraviov, 510-657-4412 smaraviov@pctsystems.com or Kirkpatrick Communications, Inc. Bruce Kirkpatrick, 925-244-9100 brucekirk@kirk-com.com PCT Systems will introduce at Semicon West in San Francisco in July the next and newest generation of megasonics cleaning for the semiconductor industry and other high technology applications. The PCT Systems Model 9400 Megasonic generators are specifically designed for today's fine geometries and fragile wafer features.
What makes the 9400 unique is:
-- A significant advancement in software integration, specifically for data acquisition and complicated recipe control.
-- Uniquely designed megasonic functionality that allows the user to customize substrate cleaning for specific applications and processes.
Megasonic generators control transducers that are attached to process modules for cleaning wafers and other substrates and for particle contamination control.
The model 9400 utilizes PCT Systems unique "multi-plexing," a technique that enables the transducers to be switched on and off or can utilize a full-on technique (all transducers working at once) depending on the specific application. This application specific feature has not been offered in the industry before.
Limits Semiconductor Substrate Damage
The 9400 has up to four independent channels, each capable of synchronized or independent control of power, frequency, and phase from 400khz to over 3 megahertz, for a total combined power of up to 2000 watts. It is the industry's first active phase shifted megasonic, providing a three dimensional integration of the energy. This leads to a significant improvement in energy uniformity, which limits substrate damage.
PCT Systems exclusive process recipe control allows the generator to be programmed for multiple frequencies at resonant levels, along with independent power control for each frequency change. This enables the customization of the frequencies for application specific processes.
New Data Acquisition Software
Enhanced data logging capabilities of the 9400 include 1 GB worth of storage for megasonic process variables such as frequency vs. time, power vs. time, compare and overlap runs, and input from an external acoustic probe. The unit includes an intelligent controller embedded in each amplifier and is easily programmed from a PDA interface panel or external laptop connection. Real-time data logging is available for sophisticated trend analysis of transducer wear patterns.
The PCT Systems generators are compatible with most all competitive transducers and can be retrofitted in the semiconductor fab, meaning that the technology will be available immediately to a wide audience.
The model 9400 generators will be on display at Semicon West in San Francisco at Moscone Center, July 15-17, booth #2341 North Hall. The product is available for immediate shipment.
About PCT Systems, Inc.: Located in Silicon Valley, PCT Systems Inc. is the high technology leader in megasonics cleaning equipment, supporting the most stringent cleaning requirements of leading-edge wafer, disk, solar cell, pharmaceutical, and bio-med industries. www.pctsystems.com
¶ Software Integration by Semiconductor Equipment Manufacturer
Allows Generator to Be Customized to Specific Applications and
Processes
